Diffusion- production issues

Limited source diffusion

Physical vapor deposition and chemical deposition

Deposition Techniques

OXIDATION

Ion Implanatation – non idealities

Ion Implanatation

Diffusion basics & constant source diffusion

ETCHING

X-ray Lithography

Optical Lithography

Lithographic Processes

Photomask manufacture

photolithography

Physics of Thermal Oxidation

Advantages of MBE Over CVD Process

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